| Product Name: Halocarbon 14 - Tetrafluoromethane CF4 |
| Packing: 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT) |
| Filling Content: 30kg/cyl |
| Items | Specifications |
| CF4 | 99.9% | 99.999% |
| O2 | ≤100 ppmv | ≤1.0 ppmv |
| N2 | ≤400 ppmv | ≤4.0 ppmv |
| CO2 | ≤80 ppmv | ≤0.5 ppmv |
| CO | ≤50 ppmv | ≤0.5 ppmv |
| CH4 | ≤50 ppmv | ≤0.5 ppmv |
| Other Halocarbons | ≤100 ppmv | ≤2.0 ppmv |
| H2O | ≤10 ppmv | ≤2.0 ppmv |
| SF6 | ≤15 ppmv | ≤1.0 ppmv |
| Acidity as HF | ≤1.0ppmv | ≤0.1ppmv |
|
| Transportation |
| DOT Shipping Name | Tetrafluoromethane, Compressed |
| DOT Classification | 2.2 |
| DOT Label | Nonflammable Gas |
| UN Number | UN1982 |
| CAS No. | 75-73-0 |
| CGA/DISS/JIS | 320/716/W22-14L |
| Shipped as | Compressed Gas |
|
| Technical Information |
| Cylinder State @ 21.1°C | Gas |
| Flammable Limits In Air | non-flammable |
| Auto Ignition Temperature (°C ) | - |
| Molecular Weight (g/mol) | 88.01 |
| Specific gravity (air =1) | 3.04 |
| Critical Temperature ( °C ) | -45.65 |
| Critical Pressure ( psig ) | 528.459 |
|
| Applications |
| One of the largest comsuption kinds of plasma etching gases in microelectronics industry , also widely used in surface cleaning of electronic device , manufacture of solar cell, laser technology , gas phase insulation , subzero refrigeration , leakage inspection agent and decontaminant of manufacture of printed circuit. |
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