| Product Name: Halocarbon 41 - Fluoromethane CH3F |
| Packing: 40L, 47L, 50L cylinder (GB, ISO, DOT) |
| Filling Content: 40kg/cyl |
| Items | Specifications |
| CH3F | 99.5% | 99.995% |
| O2 | ≤20 ppbv | ≤5 ppmv |
| N2 | ≤70 ppbv | ≤20 ppmv |
| CO2 |
| ≤10 ppmv |
| CO |
| ≤10 ppmv |
| CH4 |
| ≤5 ppmv |
| H2O | ≤10 ppbv | ≤2 ppmv |
|
| Transportation |
| DOT Shipping Name | Fluoromethane |
| DOT Classification | 2.1 |
| DOT Label | Inflammable Gas |
| UN Number | UN2810 |
| CAS No. | 593-53-3 |
| CGA/DISS/JIS | 350/724/W22-14L |
| Shipped as | Liquefield Gas |
|
| Technical Information |
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | Non-flammable |
| Auto Ignition Temperature (°C ) | -18 |
| Molecular Weight (g/mol) | 34.03 |
| Specific gravity (air =1) | 1.18 |
| Critical Temperature ( °C ) | 45 |
|
| Applications |
| In semiconductor manufacturing, fluoromethane is a plasma etching gas of silicon compound films. |
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