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| Product Name: Halocarbon 23 - Trifluoromethane CHF3 | ||
| Packing: 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT) | ||
| Filling Content: 30kg/cyl | ||
| Items | Specifications | |
| CHF3 | 99.9995% | |
| O2 | ≤1.0 ppmv | |
| N2 | ≤4.0 ppmv | |
| CO2 | ≤0.5 ppmv | |
| CO | ≤0.5 ppmv | |
| CH4 | ≤0.5 ppmv | |
| Other Organics | ≤2.0 ppmv | |
| H2O | ≤2.0 ppmv | |
| Acidity as HCL | ≤0.1 ppmv | |
| Transportation | ||
| DOT Shipping Name | Trifluoromethane | |
| DOT Classification | 2.2 | |
| DOT Label | Nonflammable Gas | |
| UN Number | UN 1984 | |
| CAS No. | 75-46-7 | |
| CGA/DISS/JIS | 660/716/W22-14L | |
| Shipped as | Liquefied Gas | |
| Technical Information | ||
| Cylinder State @ 21.1°C | Liquid | |
| Flammable Limits In Air | Non-flammable | |
| Auto Ignition Temperature (°C ) | - | |
| Molecular Weight (g/mol) | 70 | |
| Specific gravity (air =1) | 2.436 | |
| Critical Temperature ( °C ) | 178.43 | |
| Applications | ||
| · Trifluoromethane (CHF3) is used in plasma etching of silicon oxide or nitride layers. · CHF3 is a low temperature refrigerant. It is replacing chlorodifuoromethane (R22 or CHF2Cl). | ||
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