Product Name: Halocarbon C318 - Octafluorocyclobutane C4F8 |
Packing: 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT) |
Filling Content: 40kg/cyl |
Items | Specifications |
C4F8 | 99.9% | 99.999% |
O2 | ≤80 ppmv | ≤1.0 ppmv |
N2 | ≤300 ppmv | ≤3.0 ppmv |
CO2 | ≤50ppmv | ≤0.5ppmv |
CO | ≤30 ppmv | ≤0.5 ppmv |
CH4 | ≤30 ppmv | ≤0.5 ppmv |
H2O | ≤10 ppmv | ≤3.0 ppmv |
Other Organics | ≤600 ppmv | ≤5.0 ppmv |
Acidity as HCL | ≤1.0 ppmw | ≤0.1 ppmw |
|
Transportation |
DOT Shipping Name | Octafluorocyclobutane |
DOT Classification | 2.2 |
DOT Label | Nonflammable Gas |
UN Number | UN 1976 |
CAS | 115-25-3 |
CGA/DISS/JIS | 660/716/W22-14L |
Shipped as | Liquefield Gas |
|
Technical Information |
Cylinder State @ 21.1°C | Liquid |
Flammable Limits In Air | Non-flammable |
Auto Ignition Temperature (°C ) | - |
Molecular Weight (g/mol) | 200.03 |
Specific gravity (air =1) | 7.33 |
Critical Temperature ( °C ) | 115.2 |
|
Applications |
Perfluorocyclobutane (C4F8) is used in semiconductor manufacturing as plasma etching of silicon dioxide (SiO2) or silicon layers. |