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| Product Name: Silicon Tetrachloride SiCl4 | |
| Packing: Stainless Steel Drum | |
| Filling Content: 250kg/drum，300kg/drum | |
| Items | Specifications |
| SiCl4 | 99.5% & 99.999% |
| Resistivity | ≥ 300 ohm-cm |
| Boron | ≤ 0.3 ppba silicon |
| Aluminum | ≤ 50 ppbw |
| Carbon | ≤ 1.0 ppma |
| Iron | ≤ 50 ppbw |
| Other Chlorosilane | ≤ 600 ppm |
| Transportation | |
| DOT Shipping Name | Silicon Tetrachloride |
| DOT Classification | 8 ( Corrosive Material ) |
| DOT Label | Corrosive |
| UN | UN 1818 |
| CAS | 1026-04-7 |
| Shipped as | Liquefield Gas |
| Technical Information | |
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | Non-flammable |
| Auto Ignition Temperature (°C ) | - |
| Molecular Weight (g/mol) | 169.89 |
| Specific gravity (air =1) | 5.889 |
| Critical Temperature ( °C ) | 233.85 |
| Critical Pressure ( psig ) | 529.05 |
| Applications | |
| · In semiconductor fabrication, applications of epitaxial silicon . · In semiconductor fabrication, plasma etching of metals . · In organo silicon processes . · In the manufacturing of fused silica fiber. | |
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