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| Product Name: Disilane Si2H6 | |
| Packing: 40L, 47L, 50L cylinder, Y cylinder (GB, ISO, DOT) | |
| Items | Specification |
| Si2H6 | 99.998% |
| O2+ Ar | ≤1 ppmv |
| N2 | ≤1 ppmv |
| CO | ≤1 ppmv |
| CO2 | ≤1 ppmv |
| THC（CH4） | ≤1 ppmv |
| TCS ( Total Chlorosilanes ) | ≤ 0.2 ppmv |
| Higher silane | ≤ 50 ppmv |
| SiH4 | ≤ 200 ppmv |
| H2O | ≤ 1 ppmv |
| Transportation | |
| DOT Shipping Name | Flammable Compressed Gas |
| DOT Classification | 2.1 |
| DOT Label | Flammable Gas |
| UN Number | UN 3161 |
| CAS | 1590-87-0 |
| CGA/DISS/JIS | 350/632/W22-14L |
| Shipped as | Liquefield Gas |
| Technical Information | |
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | 2-98% |
| Auto Ignition Temperature (°C ) | -100 |
| Molecular Weight (g/mol) | 62.22 |
| Specific gravity (air =1) | 2.1 |
| Critical Temperature ( °C ) | 150.85 |
| Critical Pressure ( psig ) | 747 |
| Applications | |
| .Mainly used for miniaturization semiconductors manufacturing process in the high spedd and low temperature deposition of uniform thin films. .The core applicitons such as process below 20nm node IC semiconductors, advanced memory chips ( DRAM/NAND Flash ), also used in gas mixture for HIT solar cells, LTPS TFT/LCD display panels, and LED. | |
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