| Product Name: Hexafluoroethane C2F6 |
| Packing: 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT) |
| Filling Content: 40kg/cyl |
| Items | Specifications |
| C2F6 | 99.9% | 99.999% |
| O2 | ≤80 ppmv | ≤1.0 ppmv |
| N2 | ≤300 ppmv | ≤4.0 ppmv |
| CO2 | ≤50ppmv | ≤0.5ppmv |
| CO | ≤30 ppmv | ≤0.5 ppmv |
| CH4 | ≤30 ppmv | ≤0.5 ppmv |
| H2O | ≤10 ppmv | ≤1.5 ppmv |
| CF4 | ≤100 ppmv | ≤1.0 ppmv |
| Other Organics | ≤400 ppmv | ≤2.0 ppmv |
| Acidity as HCL | ≤1.0 ppmw | ≤0.1 ppmw |
|
| Transportation |
| DOT Shipping Name | Hexafluoroethane，Compressed |
| DOT Classification | 2.2 |
| DOT Label | Nonflammable Gas |
| UN Number | UN2193 |
| CAS No. | 76-16-4 |
| CGA/DISS/JIS | 660/716/W22-14L |
| Shipped as | liquefield gas |
|
| Technical Information |
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | Nonflammable |
| Auto Ignition Temperature (°C ) | - |
| Molecular Weight (g/mol) | 138.01 |
| Specific gravity (air =1) | 4.82 |
| Critical Temperature ( °C ) | 19.65 |
| Critical Pressure ( psig ) | 417.5 |
|
| Applications |
| Insulation gas and plasma etching agent . |
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