| Product Name: Nitrogen Trifluoride NF3 |
| Packing: 40L, 47L, 50L cylinder (GB, ISO, DOT) |
| Filling Content: 20kg/cyl |
| Items | Specifications |
| NF3 | 99.99% |
| O2 | ≤3.0 ppmv |
| N2 | ≤5.0 ppmv |
| CO2 | ≤1.0 ppmv |
| CO | ≤1.0 ppmv |
| CH4 | ≤1.0 ppmv |
| H2O | ≤1.0 ppmv |
| CF4 | ≤1.0 ppmv |
| N2O | ≤2.0 ppmv |
| SF6 | ≤1.0 ppmv |
| HF | ≤1.0 ppmv |
|
| Transportation |
| DOT Shipping Name | Nitrogen Trifluoride |
| DOT Classification | 2.2 |
| DOT Label | Nonflammable Gas and Oxidizer |
| UN Number | UN 2451 |
| CAS No. | 7783-54-2 |
| DISS/JIS/DIN477 | 640/W22-14L/NO.6 |
| Shipped | Liquefied Gas |
|
| Technical Information |
| Cylinder State @ 21.1°C | Gas |
| Flammable Limits In Air | Non-flammable |
| Auto Ignition Temperature (°C ) | - |
| Molecular Weight (g/mol) | 71 |
| Specific gravity (air =1) | 2.46 |
| Critical Temperature ( °C ) | -39.15 |
| Critical Pressure ( psig ) | 632.19 |
|
| Applications |
| Used for cleaning CVD Chamber or etching vapor deposition layer ( film ) during the production process of semiconductor ,TFT -LCD and solar cell. |
|
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