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| Product Name: Sulfur Hexafluoride SF6 | ||
| Packing: 40L, 47L, 50L cylinder (GB, ISO, DOT) | ||
| Filling Content: 50kg/cyl | ||
| Items | Specifications | |
| SF6 | IEC 60376 (99.7%) | 99.999% |
| Air | ≤ 0.2 % (m/m) | |
| CF4 | ≤ 0.24% (m/m) | |
| H2O | ≤ 25 ppmw | |
| HF | ≤ 1.0 ppmw | |
| Express as HF | ≤ 1.0 ppmw | |
| Mineral oil | ≤ 10 ppmw | |
| Biological noxious test | Non-toxic | |
| O2 | ≤1.0 ppmv | |
| N2 | ≤4.0 ppmv | |
| CO2 | ≤0.5ppmv | |
| CO | ≤0.5 ppmv | |
| CH4 | ≤0.5 ppmv | |
| H2O | ≤2.0 ppmv | |
| CF4 | ≤1.0 ppmv | |
| Other Halocarbons | ≤2.0 ppmv | |
| Acidity as HF | ≤0.1 ppmw | |
| Transportation | ||
| DOT Shipping Name | Sulfur Hexafluoride | |
| DOT Classification | 2.2 | |
| DOT Label | Non-flammable | |
| UN Number | UN 1080 | |
| CAS No. | 2551-62-4 | |
| CGA/DISS/JIS/BS341/DIN477 | 590 /716/W22-14R/NO.6/NO.6 | |
| Shipped as | Liquefield Gas | |
| Technical Information | ||
| Cylinder State @ 21.1°C | Liquid | |
| Flammable Limits In Air | Non-flammable | |
| Auto Ignition Temperature (°C ) | - | |
| Molecular Weight (g/mol) | 146.05 | |
| Specific gravity (air =1) | 5.11 | |
| Critical Temperature ( °C ) | 45.54 | |
| Critical Pressure ( psig ) | 530.49 | |
| Applications | ||
| · As a dielectric in transformers · As a blanketing agent in metal fabrication · In semiconductor fabrication: fluorine source for high density plasma etching - offers high selectivity without generating carbon by-products. | ||
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